Electric Properties of AlGaN/GaN/Si High electron Mobility Transistors
نویسندگان
چکیده
This work investigated the electrical properties in AlGaN/GaN/Si HEMTsgrown by molecular beam epitaxy. The behavior have been using electric permittivity, modulus formalism and conductance measurements. As has found from conductance, dispersive is related to barrier inhomogeneity deep trap layer. On other hand, strain relaxation of charge transport studied both permittivity formalisms.
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ژورنال
عنوان ژورنال: Silicon
سال: 2021
ISSN: ['1876-9918', '1876-990X']
DOI: https://doi.org/10.1007/s12633-021-01486-6